You have your standard spooky noises at night, people walking through dark hallways alone, etc. Very creepy atmosphere overall that increases, especially intense towards last half of movie.
Several jump scares involving frightening sounds, growls, screams and very unnatural voices, as cameras and sound/recording equipment (and in one case, an ultrasound machine) either malfunctions or picks up something supernatural.
The last two-thirds of the film are somewhat tense as Rachel's pregnancy comes along and we know that something's not right with the child, also Rachel's mental state deteriorates despite all her family's attempts to keep her healthy, which becomes increasingly disturbing.
The final scene where Rachel goes into labor and gives birth in her bedroom during a blackout, only lit by camera light, is very intense. The moment when Rachel calmly holds her newborn baby and without warning, stabs and kills it, is meant to be the most upsetting and shocking scene in the movie (and will have the intended effect on most viewers).